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Harbin Inst Technol, Micro Nanotechnol Res Ctr, Key Lab Microsyst & Microstruct Mfg, Yikuangjie 2, Harbin 150080, Heilongjiang, Peoples R China
Max Planck Inst Intelligent Syst, Heisenbergstr 3, D-70569 Stuttgart, Germany Harbin Inst Technol, Micro Nanotechnol Res Ctr, Key Lab Microsyst & Microstruct Mfg, Yikuangjie 2, Harbin 150080, Heilongjiang, Peoples R China