Influence of the initial composition of a methane-argon mixture on the electricophysical parameters and plasma composition of DC glow discharge

被引：0
作者：
A. M. Efremov
O. A. Semenova
S. M. Barinov
机构：
[1] Ivanovo State University of Chemistry and Technology,
来源：
High Temperature | 2015年 / 53卷
关键词：
Initial Composition; Electron Energy Distribution Function; Annihilation Rate; Average Electron Energy; Argon Mixture;
D O I：
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中图分类号：
学科分类号：
摘要：
The stationary parameters and composition of DC glow discharge plasma (p = 40–200 Pa, i = 30–70 mA) in CH4-Ar mixtures of different compositions have been studied by probe diagnostics and mathematical simulation. Data on the influence of the initial composition of the plasma-forming mixture on the reduced electric field strength, energy electron distribution, rate constants of processes under electron impact, stationary concentrations, and flux densities of neutral and charged particles have been obtained.
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页码：171 / 178
页数：7
相关论文
共 119 条
[11]  
Voss L(1995)undefined Plasma Phys. Rep. 21 872-undefined
[12]  
Khanna R(2001)undefined J. Appl. Phys. 90 520-undefined
[13]  
Gila BP(2001)undefined J. Appl. Phys. 34 1479-undefined
[14]  
Norton DP(1998)undefined Chem. Eng. Sci. 53 3875-undefined
[15]  
Pearton SJ(1994)undefined J. Phys. D: Appl. Phys. 27 818-undefined
[16]  
Ren F(2013)undefined Russ. Microelectron. 42 301-undefined
[17]  
Hyun C(2014)undefined High Temp. 52 348-undefined
[18]  
Vartuli CB(1984)undefined Khim. Vys. Energ. 18 363-undefined
[19]  
Donovan SM(1990)undefined Khim. Vys. Energ. 24 541-undefined
[20]  
Abernathy CR(1984)undefined Khim. Vys. Energ. 18 462-undefined
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