Influence of the initial composition of a methane-argon mixture on the electricophysical parameters and plasma composition of DC glow discharge

被引：0
作者：
A. M. Efremov
O. A. Semenova
S. M. Barinov
机构：
[1] Ivanovo State University of Chemistry and Technology,
来源：
High Temperature | 2015年 / 53卷
关键词：
Initial Composition; Electron Energy Distribution Function; Annihilation Rate; Average Electron Energy; Argon Mixture;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The stationary parameters and composition of DC glow discharge plasma (p = 40–200 Pa, i = 30–70 mA) in CH4-Ar mixtures of different compositions have been studied by probe diagnostics and mathematical simulation. Data on the influence of the initial composition of the plasma-forming mixture on the reduced electric field strength, energy electron distribution, rate constants of processes under electron impact, stationary concentrations, and flux densities of neutral and charged particles have been obtained.
引用
收藏
页码：171 / 178
页数：7
相关论文
共 119 条
[1]  
Eddy CR(1999)undefined J. Vac. Sci. Technol., A 17 780-undefined
[2]  
Leonhardt D(2004)undefined J. Vac. Sci. Technol., A 22 598-undefined
[3]  
Douglass SR(2006)undefined Appl. Surf. Sci. 253 1269-undefined
[4]  
Shamamian VA(1998)undefined J. Vac. Sci. Technol., A 16 1631-undefined
[5]  
Thoms BD(2008)undefined Thin Solid Films 516 3910-undefined
[6]  
Buler JE(2010)undefined J. Phys. D: Appl. Phys. 43 205201-undefined
[7]  
Kim HK(2008)undefined Thin Solid Films 516 6570-undefined
[8]  
Lin H(2006)undefined Plasma Sources Sci. Technol. 15 117-undefined
[9]  
Ra Y(2002)undefined J. Appl. Phys. 91 40-undefined
[10]  
Lim W(2001)undefined Plasma Sources Sci. Technol. 10 147-undefined
12345678910