Selective laser melting of high aspect ratio 3D nickel-titanium structures two way trained for MEMS applications

被引：83

作者：

Clare A.T. ^{[1
]}

Chalker P.R. ^{[1
]}

Davies S. ^{[1
]}

Sutcliffe C.J. ^{[1
]}

Tsopanos S. ^{[1
]}

机构：

[1] Department of Engineering, Materials Science and Engineering, University of Liverpool, Liverpool L69 3GH, Brownlow Hill

来源：

Int. J. Mech. Mater. Des. | 2008年 / 2卷 / 181-187期

基金：

英国工程与自然科学研究理事会;

关键词：

Differential scanning calorimetry; MEMS; Micro actuators; Micro machining; NiTi alloys; Selective laser melting; Shape memory effect SME;

D O I：

10.1007/s10999-007-9032-4

中图分类号：

学科分类号：

摘要：

Selective laser melting has been used to build high aspect ratio, three-dimensional NiTi micro-electro-mechanical components. Cantilever beams manufactured in this way have been two-way trained and actuated by ohmic heating demonstrating the suitability of the process for applications in micro-electromechanical technologies. The influence of laser dwell time and raster pitch on the density of NiTi shape memory alloy parts and the resolvable feature sizes achievable are discussed. The shape memory effect properties of solid parts produced by selective laser melting are also reported in contrast to those properties exhibited by NiTi alloys resulting from other processes. © 2007 Springer Science+Business Media B.V.

引用

页码：181 / 187

页数：6

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