Localization of plasma in the extended hollow cathode of a ribbon-electron-beam plasma source at forevacuum pressures

The results of a study of the plasma density distribution in the slit aperture of a right-angled extended hollow cathode used in a ribbon-electron-beam plasma source operating at forevacuum pressures (1-10 Pa) are presented. It is shown that a local peak of plasma density appears in some region of the slit aperture as the slit width is decreased. This results in the appearance of a region of increased current density when the ribbon beam forms. The uniformity of the beam current density distribution is additionally disturbed by the reverse ion flow whose effect on the emission properties of the plasma is significant in the region of elevated pressure. A model which describes the development of plasma density nonuniformity in a hollow cathode is proposed which is based on the idea that the electron current flows predominantly through the slit aperture regions that are associated with local openings of the cathode layer ion sheaths. © 2007 Springer Science+Business Media, Inc.