Role of Zinc Source in Chemical Bath Deposition of Zinc Sulfide Thin Films on Si3N4

被引:0
作者
P. A. Luque
Claudia M. Gómez-Gutiérrez
G. Lastra
A. Carrillo-Castillo
M. A. Quevedo-López
A. Olivas
机构
[1] UABC,Facultad de Ingeniería, Arquitectura y Diseño
[2] PCeIM,Instituto de Ingeniería y Tecnología
[3] Centro de Nanociencias y Nanotecnología-UNAM,Department of Materials Science and Engineering
[4] UACJ,Departamento de Polímeros y Materiales
[5] University of Texas at Dallas,undefined
[6] Universidad de Sonora,undefined
[7] Centro de Nanociencias y Nanotecnología-UNAM,undefined
来源
Journal of Electronic Materials | 2014年 / 43卷
关键词
Chemical bath deposition; ZnS; thin films; zinc source;
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摘要
Zinc sulfide (ZnS) thin films have been grown by chemical bath deposition (CBD) using different zinc sources on a silicon nitride (Si3N4) substrate in an alkaline solution. The zinc precursors used were zinc acetate, zinc nitrate, and zinc sulfate. The structural and optical characteristics of the ZnS thin films obtained were analyzed. The morphology of the surface showed that the films were compact and uniform, with some pinholes in the surface depending on the zinc source. The most homogeneous and compact surfaces were those obtained using zinc nitrate as the zinc source with a root-mean-square (RMS) value of 3 nm. The transmission spectra indicated average transmittance of 80% to 85% in the spectral range from 300 nm to 800 nm, and the optical bandgap calculated for the films was around 3.71 eV to 3.74 eV.
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页码:4317 / 4321
页数:4
相关论文
共 117 条
  • [1] Wang L(2010)undefined J. Lumin. 130 137-undefined
  • [2] Xu X(1991)undefined Appl. Phys. Lett. 59 1272-undefined
  • [3] Yuan X(2003)undefined Appl. Surf. Sci. 212 305-undefined
  • [4] Haase MA(2003)undefined Thin Solid Films 431 242-undefined
  • [5] Qiu J(1993)undefined J. Cryst. Growth 127 314-undefined
  • [6] Depuydt JM(2007)undefined J. Lumin. 122 172-undefined
  • [7] Cheng H(1998)undefined Mater. Res. Bull. 33 453-undefined
  • [8] Shao LX(2001)undefined J. Electrochem. Soc. 148 357-undefined
  • [9] Chang KH(1995)undefined Thin Solid Films 263 248-undefined
  • [10] Hwang HL(2004)undefined Appl. Phys. A 79 1941-undefined