Fine purification of silane for removal of chlorosilanes by membrane gas separation

被引:0
作者
V. M. Vorotyntsev
P. N. Drozdov
I. V. Vorotyntsev
S. N. Manokhina
S. S. Knysh
机构
[1] Nizhni Novgorod State Technical University,
来源
Petroleum Chemistry | 2013年 / 53卷
关键词
silane; chlorosilanes; membrane; polydimethylsiloxane; gas separation;
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学科分类号
摘要
The membrane separation of a silane, dichlorosilane, trichlorosilane, and tetrachlorosilane gas mixture has been theoretically and experimentally studied. The ideal separation factors have been determined experimentally and their values in the separation cell at pressures P1 and P2 have been found. The separation factor has been calculated for different ratios of flows in the compartments of a membrane module. The silane cleaning process for the removal of highly penetrating impurities in a radial membrane module and in a membrane module with a feed tank has been calculated.
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页码:627 / 631
页数:4
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