Alumina ceramic based high-temperature performance of wireless passive pressure sensor

被引：0
作者：
Bo Wang
Guozhu Wu
Tao Guo
Qiulin Tan
机构：
[1] North University of China,School of Computer Science and Control Engineering
[2] North University of China,Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education
[3] North University of China,Science and Technology on Electronic Test and Measurement Laboratory
来源：
Photonic Sensors | 2016年 / 6卷
关键词：
Pressure sensor; wireless passive; high temperature; zero drift; resonant frequency;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A wireless passive pressure sensor equivalent to inductive-capacitive (LC) resonance circuit and based on alumina ceramic is fabricated by using high temperature sintering ceramic and post-fire metallization processes. Cylindrical copper spiral reader antenna and insulation layer are designed to realize the wireless measurement for the sensor in high temperature environment. The high temperature performance of the sensor is analyzed and discussed by studying the phase-frequency and amplitude-frequency characteristics of reader antenna. The average frequency change of sensor is 0.68 kHz/°C when the temperature changes from 27°C to 700°C and the relative change of twice measurements is 2.12%, with high characteristic of repeatability. The study of temperature-drift characteristic of pressure sensor in high temperature environment lays a good basis for the temperature compensation methods and insures the pressure signal readout accurately.
引用
收藏
页码：328 / 332
页数：4
相关论文
共 71 条
[1]  
Pulliam W. J.(2002)High-temperature high-bandwidth fiber optic MEMS pressure-sensor technology for turbine engine component testing SPIE 4578 229-238
[2]  
Russler P. M.(2004)The changing automotive environment: High-temperature electronics IEEE Transactions on Electronics Packaging Manufacturing 27 164-176
[3]  
Fielder R. S.(2009)Design of a small personal air monitor and its application in aircraft Science of the Total Environment 407 1206-1210
[4]  
Johnson R. W.(2013)Graphene based piezoresistive pressure sensor Applied Physics Letters 102 161904-1–161904–3.
[5]  
Evans J. L.(2013)A minimally invasive implantable wireless pressure sensor for continuous IOP monitoring IEEE Transactions on Biomedical Engineering 60 250-256
[6]  
Jacobsen P.(2011)Computer aided modeling and diaphragm design approach for high sensitivity silicon-on-insulator pressure sensors Measurement 44 1924-1936
[7]  
Thompson J. R.(2015)A novel SOI pressure sensor for high temperature application Journal of Semiconductors 36 014014-1–14014–5
[8]  
Christopher M.(2010)Electromechanical computing at 500°C with silicon carbide Science 329 1316-1318
[9]  
Netten C. V.(2014)Development of a sapphire optical pressure sensor for high-temperature applications SPIE 9113 91130H-1–91130H–15
[10]  
Zhu S. E.(2005)A novel temperature-insensitive optical fiber pressure sensor for harsh environments IEEE Photonics Technology Letters 17 870-872
12345678