共 28 条
- [1] de Lyon TJ(1998)undefined J. Vac. Sci. B 16 1321-undefined
- [2] Vigil JA(1992)undefined Appl Phys. Lett. 91 666-undefined
- [3] Jensen JE(1985)undefined IEEE Trans. Electron Dev. 32 1584-undefined
- [4] Wu OK(1991)undefined IEEE Trans. Electron Dev. 38 1792-undefined
- [5] Johnson JL(1999)undefined J. Electron. Mater. 28 617-undefined
- [6] Patten EA(1982)undefined J. Vac. Sci. 21 215-undefined
- [7] Kosai K(undefined)undefined undefined undefined undefined-undefined
- [8] Venzor G(undefined)undefined undefined undefined undefined-undefined
- [9] Lee V(undefined)undefined undefined undefined undefined-undefined
- [10] Johnson SM(undefined)undefined undefined undefined undefined-undefined