Progress of (Sr, Ba) TiO3 ferroelectric thin film and tunability

被引：5
作者：
Fu Xinghua
Shan Lianwei
Ding Biyan
Hou Wenping
Fang Zhou
Fu Zhengyi
机构：
[1] Wuhan University of Technology,The State Key Laboratory of Material Composite and Advanced Technology
[2] Jinan University,Department of Materials Science and Engineering
来源：
Bulletin of Materials Science | 2004年 / 27卷 / 5期
关键词：
(Sr, Ba) TiO; ferroelectric thin films; sol-gel; tunability; dielectric loss;
D O I：
10.1007/BF02708560
中图分类号：
学科分类号：
摘要：
The fabrication method, technology route and structure performances of (Sr, Ba) TiO3 (SBT) ferroelectric thin film have been summarized in this paper. The tunability of dielectric constant, dielectric loss and leakage current are the basic parameters of tunable microwave devices. The thin films of SBT with high properties could be fabricated by means of RF magnetron sputtering and sol- gel processing. The electrical performances of thin film material can be improved largely by dopants. Some problems are put forward to pay attention to this material research process.
引用
收藏
页码：433 / 439
页数：6
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