Joining of Broken Multiwalled Carbon Nanotubes Using an Electron Beam-Induced Deposition (EBID) Technique

被引：0
|
作者：
Shivani Dhall
Gayatri Vaidya
Neena Jaggi
机构：
[1] National Institute of Technology,Department of Physics
[2] Indian Institute of Technology,Department of Electrical Engineering, Centre of Excellence in Nanoelectronics (CEN)
来源：
Journal of Electronic Materials | 2014年 / 43卷
关键词：
Functionalization; EBID technique; –; characteristics; photolithography;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
In the present work, joining of broken multiwalled carbon nanotubes (MWCNTs) via an electron beam-induced deposition technique is discussed. Current-induced breakdown caused by Joule heating was achieved by applying an appropriate sweep voltage. Scanning electron microscopy images indicated physical joining of broken tubes. To confirm electrical joining of the tubes, current–voltage measurements of the same tube were carried out before and after joining. The current–voltage characteristics remained ohmic after joining of the broken tube. Furthermore, it was found that deposited platinum (Pt) forms ohmic contacts with different shells of MWCNTs after joining, whereas tungsten (W) does not. This approach provides a significant tool for repairing CNTs in interconnect technologies and assembly of three-dimensional (3D) nanostructures.
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页码：3283 / 3289
页数：6
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