Joining of Broken Multiwalled Carbon Nanotubes Using an Electron Beam-Induced Deposition (EBID) Technique

被引：0
|
作者：
Shivani Dhall
Gayatri Vaidya
Neena Jaggi
机构：
[1] National Institute of Technology,Department of Physics
[2] Indian Institute of Technology,Department of Electrical Engineering, Centre of Excellence in Nanoelectronics (CEN)
来源：
Journal of Electronic Materials | 2014年 / 43卷
关键词：
Functionalization; EBID technique; –; characteristics; photolithography;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
In the present work, joining of broken multiwalled carbon nanotubes (MWCNTs) via an electron beam-induced deposition technique is discussed. Current-induced breakdown caused by Joule heating was achieved by applying an appropriate sweep voltage. Scanning electron microscopy images indicated physical joining of broken tubes. To confirm electrical joining of the tubes, current–voltage measurements of the same tube were carried out before and after joining. The current–voltage characteristics remained ohmic after joining of the broken tube. Furthermore, it was found that deposited platinum (Pt) forms ohmic contacts with different shells of MWCNTs after joining, whereas tungsten (W) does not. This approach provides a significant tool for repairing CNTs in interconnect technologies and assembly of three-dimensional (3D) nanostructures.
引用
收藏
页码：3283 / 3289
页数：6
相关论文
共 50 条
  • [1] Joining of Broken Multiwalled Carbon Nanotubes Using an Electron Beam-Induced Deposition (EBID) Technique
    Dhall, Shivani
    Vaidya, Gayatri
    Jaggi, Neena
    JOURNAL OF ELECTRONIC MATERIALS, 2014, 43 (09) : 3283 - 3289
  • [2] Enhancement in Electrical Conductance of Pt Decorated Multiwalled Carbon Tubes Using Electron Beam-Induced Deposition Technique
    Dhall, Shivani
    Vaidya, Gayatri
    Jaggi, Neena
    FULLERENES NANOTUBES AND CARBON NANOSTRUCTURES, 2015, 23 (04) : 371 - 375
  • [3] On-line nanolithography using electron beam-induced deposition technique
    Hübner, U
    Plontke, R
    Blume, M
    Reinhardt, A
    Koops, HWP
    MICROELECTRONIC ENGINEERING, 2001, 57-8 : 953 - 958
  • [4] Fabrication of an UltraLow-Resistance Ohmic Contact to MWCNT-Metal Interconnect Using Graphitic Carbon by Electron Beam-Induced Deposition (EBID)
    Kim, Songkil
    Kulkarni, Dhaval D.
    Rykaczewski, Konrad
    Henry, Mathias
    Tsukruk, Vladimir V.
    Fedorov, Andrei G.
    IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2012, 11 (06) : 1223 - 1230
  • [5] Electron irradiation induced wall-to-wall joining of multiwalled carbon nanotubes
    Kumari, Reetu
    Tyagi, Pawan K.
    Puri, Nitin K.
    APPLIED SURFACE SCIENCE, 2018, 453 : 153 - 158
  • [6] Analysis of electron beam induced deposition (EBID) of residual hydrocarbons in electron microscopy
    Rykaczewski, Konrad
    White, William B.
    Fedorov, Andrei G.
    JOURNAL OF APPLIED PHYSICS, 2007, 101 (05)
  • [7] RETRACTED ARTICLE: Electron beam-induced surface modification and nano-engineering of carbon nanotubes: Single-walled and multiwalled
    S. Gupta
    R. J. Patel
    R. E. Giedd
    Journal of Materials Research, 2006, 21 : 3109 - 3123
  • [8] Electron beam-induced structure transformation of single-walled carbon nanotubes
    Zou, HL
    Yang, YL
    Li, QW
    Zhang, J
    Liu, ZF
    Guo, XY
    Du, ZL
    CARBON, 2002, 40 (12) : 2282 - 2284
  • [9] Electron beam-induced nano-deposition using a transmission electron microscope
    Shimojo, M
    Mitsuishi, K
    Tanaka, M
    Song, M
    Furuya, K
    CROSS-DISCIPLINARY APPLIED RESEARCH IN MATERIALS SCIENCE AND TECHNOLOGY, 2005, 480 : 129 - 132
  • [10] Carbon nanopillar laterally grown with electron beam-induced chemical vapor deposition
    Fujita, J
    Ishida, M
    Ichihashi, T
    Ochiai, Y
    Kaito, T
    Matsui, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (06): : 2990 - 2993
12345