Resonance Characteristics of Piezoelectric Resonator Based on Digital Driving Circuit of Field-Programmable Gate Array

被引：1

作者：

Wang Z. ^{[1
]}

Wu X. ^{[1
]}

Shu S. ^{[1
]}

机构：

[1] Department of Micro/Nano Electronics, Shanghai Jiao Tong University, Shanghai

来源：

Journal of Shanghai Jiaotong University (Science) | 2019年 / 24卷 / 01期

关键词：

A; field-programmable gate array (FPGA); linearity; piezoelectric resonators; quality factor; resonant mode; TN; 602;

D O I：

10.1007/s12204-019-2034-1

中图分类号：

学科分类号：

摘要：

Piezoelectric resonators are widely used in frequency reference devices, mass sensors, resonant sensors (such as gyros and accelerometers), etc. Piezoelectric resonators usually work in a special resonant mode. Obtaining working resonant mode with high quality is key to improve the performance of piezoelectric resonators. In this paper, the resonance characteristics of a rectangular lead zirconium titanate (PZT) piezoelectric resonator are studied. On the basis of the field-programmable gate array (FPGA) embedded system, direct digital synthesizer (DDS) and automatic gain controller (AGC) are used to generate the driving signals with precisely adjustable frequency and amplitude. The driving signals are used to excite the piezoelectric resonator to the working vibration mode. The influence of the connection of driving electrodes and voltage amplitude on the vibration of the resonator is studied. The quality factor and vibration linearity of the resonator are studied with various driving methods mentioned in this paper. The resonator reaches resonant mode at 330 kHz by different driving methods. The relationship between resonant amplitude and driving signal amplitude is linear. The quality factor reaches over 150 by different driving methods. The results provide a theoretical reference for the efficient excitation of the piezoelectric resonator. © 2019, Shanghai Jiaotong University and Springer-Verlag GmbH Germany, part of Springer Nature.

引用

页码：1 / 6

页数：5

共 15 条

[1]

Li G.B., Wu X.S., Chen W.Y., Design of digital detection circuit for piezoelectric gyroscope based on FPGA [J], Transducer and Microsystem Technologies, 35, 9, pp. 92-94, (2016)

[2]

Choi G.B., Design of piezoelectric gyro-sensor using lanthanum gallium silicate (La3Ga5SiO14) and temperature behavior of langasite [D], (2016)

[3]

Golestanyan E., Array of piezoelectric wires in acoustic energy harvesting [D], (2015)

[4]

Paliwal N., Mukhija N., Bhatia D., Design and optimization of high quality factor MEMS piezoelectric resonator with pseudo electrodes [C], Proceedings of the 2015 4th International Conference on Reliability, pp. 1-5, (2015)

[5]

Zhu H.S., Lee J.E.Y., Design of phononic crystal tethers for frequency-selective quality factor enhancement in AlN piezoelectric-on-silicon resonators [J], Procedia Engineering, 120, pp. 516-519, (2015)

[6]

Hung L.W., High-Q low-impedance MEMS resonators [D], (2011)

[7]

Abdolvand R., Thin-film piezoelectric-on-substrate resonators and narrowband filters [D], (2008)

[8]

Calhoun P.J., Frequency synthesis using MEMS piezoelectric resonators [D], (2004)

[9]

Wu X.S., Chen W.Y., Zhang W.P., Et al., Modeling analysis of piezoelectric micromachined modal gyroscope (PMMG) [C], Proceedings of the 2009 4th IEEE International Conference on Nano Micro Engineered and Molecular Systems, pp. 304-309, (2009)

[10]

Block S.T., Jiang X.N., Cui C., Et al., A 100 nW CMOS wake-up receiver with −60 dBm sensitivity using AlN high-Q piezoelectric resonators [C], Proceedings of the 2017 IEEE International Symposium on Circuits and Systems (ISCAS), pp. 1-4, (2017)

← 1 2 →