Deposition of boride, nitride, and silicide coatings with desired crystal morphology and perfection

被引：0
作者：
P. I. Ignatenko
机构：
[1] Donetsk National University,
来源：
Technical Physics | 2011年 / 56卷
关键词：
Supersaturation; Boride; Columnar Structure; Elastic Strain Energy; Specific Free Energy;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The influence of the relative supersaturation, elastic strain energy of the growing phase, and adhesion energy on the morphology and orientation of boride, nitride, and silicide coatings is estimated using X-ray diffraction, electron microscopy, and secondary-ion mass spectrometry data. A diagram is constructed from which growth conditions for phases with given morphology and structural perfection can be found.
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页码：264 / 268
页数：4
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