Projected range and range straggling of ion-implanted lead in polystyrene materials

被引:0
|
作者
J.H. Liang
机构
[1] Department of Nuclear Engineering and Engineering Physics,
[2] National Tsing Hua University,undefined
[3] Hsinchu,undefined
[4] Taiwan 30043,undefined
[5] R.O.C. (Fax: +886-31/572-0724,undefined
[6] E-mail: jhliang@faculty.nthu.edu.tw),undefined
来源
Applied Physics A | 1997年 / 64卷
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PACS: 81.40;
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暂无
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摘要
 lead ions/cm2 at energies from 40 to 360 keV at room temperature. Projected ranges and range stragglings were measured using SIMS. Experimental results are compared with calculated values obtained using the modified Biersack theory and TRIM-95 Monte-Carlo calculations. The comparison shows that large discrepancies between TRIM-95 calculations and measured values are significantly reduced by applying the modified Biersack theory along with taking the first four moments of nuclear and electronic energy losses into consideration. The differences between calculated values obtained using the modified Biersack theory and measured values are, on average, 9% and 20% projected ranges and range stragglings, respectively.
引用
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页码:403 / 405
页数:2
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