Plasma based formation and deposition of metal and metal oxide nanoparticles using a gas aggregation source

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作者
Oleksandr Polonskyi
Amir Mohammad Ahadi
Tilo Peter
Kenji Fujioka
Jan Willem Abraham
Egle Vasiliauskaite
Alexander Hinz
Thomas Strunskus
Sebastian Wolf
Michael Bonitz
Holger Kersten
Franz Faupel
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[1] Chair for Multicomponent Materials,
[2] Faculty of Engineering,undefined
[3] Christian-Albrechts-Universität zu Kiel,undefined
[4] Institute of Theoretical Physics and Astrophysics,undefined
[5] Christian-Albrechts-Universität zu Kiel,undefined
[6] Institute of Experimental and Applied Physics,undefined
[7] Plasma Technology,undefined
[8] Christian-Albrechts-Universität zu Kiel,undefined
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