ZnO-Based transparent electrodes: Optimization of composition and synthesis conditions, study of properties

被引：0

作者：

A. Sh. Asvarov

A. Kh. Abduev

A. K. Akhmedov

机构：

[1] Russian Academy of Sciences,Amirkhanov Institute of Physics, Dagestan Scientific Center

来源：

Bulletin of the Lebedev Physics Institute | 2010年 / 37卷

关键词：

zinc oxide; doping; magnetron sputtering; thin films stability;

D O I：

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中图分类号：

学科分类号：

摘要：

We present the results of comparative studies of the characteristics of ZnO-based transparent conductive layers doped with gallium (GZO) and aluminum (AZO), grown by dc magnetron sputtering of ceramic targets at various substrate temperatures (Tsub). Particular attention is paid to the study of stability of electrical characteristics of layers under temperature and humidity.

引用

页码：18 / 19

页数：1