Frequency response of a self-actuating cantilever sensor immersed in fluid

This work aims at studying the resonant frequency response of self-actuating piezoelectric rectangular and stepped cantilever sensors and using these results to determine the density of a fluidic media. The electric impedance analyzer is used to determine the resonant frequencies of the two cantilevers under the vacuum, air and partially-immersed conditions. Micro-milling is used to fabricate the steel cantilevers and a thin PZT-5H piezoelectric patch is mounted on its top surface. The experimental results are compared with the analytical and numerical ones. The study results show the good conformity and a higher resonant frequency shift is observed in the stepped cantilevers in all cases.