Phase-coherent, injection-seeded, table-top soft-X-ray lasers at 18.9 nm and 13.9 nm

There is keen interest in generating intense, coherent, soft-X-ray beams for scientific and measurement applications1. Here, we report the demonstration of soft-X-ray lasers with essentially full spatial and temporal coherence operating at wavelengths below 20 nm, and in particular within the 13-nm spectral region, which is important for the manufacturing of computer chips using extreme uv lithography. Gain-saturated pulses were produced in dense laser-created plasmas by amplifying high-harmonic seed pulses in the 18.9-nm and 13.9-nm transitions of nickel-like molybdenum and silver ions, respectively. These results, obtained using an injection seeding technique that can also be applied to improve the temporal coherence of free-electron lasers, extend our ability to generate bright phase-coherent laser beams to significantly shorter wavelengths. Moreover, the experiments were conducted using a practical table-top laser2. These compact soft-X-ray lasers offer new scientific opportunities, such as high-resolution coherent imaging and phase-coherent probing of atomic and molecular systems, in small laboratory environments.