Material removal and chemical and structural changes induced by irradiation of polymer surfaces with KrF-excimer laser radiation

被引：0

作者：

D. A. Wesner

M. Aden

J. Gottmann

A. Husmann

E. W. Kreutz

机构：

[1] Lehrstuhl für Lasertechnik der Rheinisch-Westfälischen Technischen Hochschule Aachen,

[2] Steinbachstrasse 15,undefined

[3] D-52074 Aachen,undefined

[4] Germany,undefined

[5] Fraunhofer Institut für Lasertechnik,undefined

[6] Steinbachstrasse 15,undefined

[7] D-52074 Aachen,undefined

[8] Germany,undefined

来源：

Fresenius' Journal of Analytical Chemistry | 1999年 / 365卷

关键词：

Radiation; Polymer; Structural Change; Polypropylene; Laser Radiation;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Holes in polypropylene (PP) and polymethylmethacrylate (PMMA) plates, 0.5 mm in thickness were drilled by irradiation with up to 3000 pulses of KrF-excimer laser radiation (λ = 248 nm) at fluences per pulse ɛ in the range 0.1–10 J/cm2, conditions which yield a laser-induced plasma/vapor plume. The process was analyzed experimentally in terms of material removal rate, optical emission of the laser-induced plasma, hole geometry, debris production at the hole edge, and chemical changes in the polymer induced by the laser irradiation. Additionally, the process was simulated using a model based on degradation of the polymer induced by optical absorption and heating, leading to gas-phase products. Such characteristics as the material removal rate as a function of fluence, the nature of the gas phase products and the deposition of debris were calculated.

引用

页码：183 / 187

页数：4