Influence of heterogeneous physicochemical processes on the parameters of low-temperature plasma

被引：0
|
作者：
S. A. Smirnov
V. A. Titov
V. V. Rybkin
机构：
[1] Ivanovo State University of Chemistry and Technology,Krestov Institute of Solution Chemistry
[2] Russian Academy of Sciences,undefined
来源：
Russian Journal of General Chemistry | 2015年 / 85卷
关键词：
General Chemistry; Polyimide; Plasma Treatment; Oxygen Plasma; Electric Field Intensity;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The influence of the gaseous products of heterogeneous processes, such as recombination and deactivation of active species on the physical characteristics of plasma and the rates of the processes involving electrons is considered.
引用
收藏
页码：1260 / 1269
页数：9
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