Comparative investigations of the measurement capabilities of atomic-force microscopy and optical interferometry methods

被引：0

作者：

A. S. Gusev

V. L. Lyaskovskii

D. V. Voloshin

S. Yu. Zolotarevskii

机构：

[1] All-Russia Research Institute of Optophysical Measurements (VNIIOFI),

来源：

Measurement Techniques | 2010年 / 53卷

关键词：

atomic-force microscopy; optical interferometry; methods for the non-destructive testing and the investigation of nanostructures;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Cross measurements of surface relief of nanometer dimensions using atomic-force microscopy and optical interferometry methods are described. The investigations enable the regions where it is best to use these methods for different kinds of objects to be determined.

引用

页码：878 / 881

页数：3