Synthetic Semiconductor Diamond Electrodes: Comparison of Electrochemical Impedance at the Growth and Nucleation Surfaces of a Coarse-Grained Polycrystalline Film

被引:0
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作者
Yu. V. Pleskov
M. D. Krotova
Yu. E. Evstefeeva
V. G. Ral'chenko
I. I. Vlasov
A. V. Khomich
机构
[1] Russian Academy of Sciences,Frumkin Institute of Electrochemistry
[2] Russian Academy of Sciences,Institute of General Physics
[3] Institute of Radio Engineering and Electronics,undefined
来源
Russian Journal of Electrochemistry | 2001年 / 37卷
关键词
Physical Chemistry; Crystal Structure; Boron; Film Growth; Perfect Crystal;
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摘要
A comparative study of the impedance of the growth and nucleation surfaces of a free-standing film of polycrystalline diamond deposited from RF-plasma and moderately doped with boron is performed. Using Mott–Schottky plots, the acceptor concentration is determined. It is shown that in the diamond bulk adjacent to the film growth side, which has more perfect crystal structure, this concentration is much lower than that near the nucleation side, where the film consists of submicron-sized grains.
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页码:1123 / 1127
页数:4
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