Statistical simulation for process design and optimization in IC manufacture

被引：1

作者：

A. A. Kouleshoff

V. S. Malyshev

V. V. Nelayev

V. R. Stempitsky

机构：

[1] Belarussian State University of Information Science, Radio, and Electronics, Minsk

[2] Belarussian State University, Minsk

[3] Belmikrosistemy, NPO Integral

来源：

Russian Microelectronics | 2003年 / 32卷 / 1期

关键词：

Process Design; Measured Data; Statistical Simulation; CMOS Technology; Circuit Parameter;

D O I：

10.1023/A:1021861819656

中图分类号：

学科分类号：

摘要：

An approach to multidimensional statistical simulation for process design and optimization in IC manufacture is proposed. It essentially takes account of the sensitivity of circuit parameters to the random variability of process parameters. The approach is implemented in an algorithm and software for process statistical analysis and optimization. The response-surface methodology and pattern-recognition techniques are used for the approximation of relations between process and circuit parameters. The capabilities of the approach are evaluated from simulated and measured data on the fabrication of transistors by routine bipolar and CMOS technologies.

引用

页码：39 / 50

页数：11

共 50 条

[41] Accelarating joint design: Simulation building blocks and process support [J].

Valentin, EC ;

Appelman, JH ;

Den Hengst-Bruggeling, M .

ESM 2003: 17TH EUROPEAN SIMULATION MULTICONFERENCE: FOUNDATIONS FOR SUCCESSFUL MODELLING & SIMULATION, 2003, :645-651

[42] Research on Optimization of Project Design Management Process Based on BIM [J].

Jiao, Yuanhang ;

Cao, Ping .

BUILDINGS, 2023, 13 (09)

[43] Reliable Tension Leveling Process Design Using Stochastic Optimization [J].

Hamasaki, Hiroshi ;

Shigaki, Masaki ;

Yoshida, Fusahito ;

Toropov, Vassili .

TETSU TO HAGANE-JOURNAL OF THE IRON AND STEEL INSTITUTE OF JAPAN, 2009, 95 (11) :740-746

[44] Shearing Process Design and Optimization for NC Transverse Shear Line [J].

Wu, Wenqiang ;

Zhang, Chunliang .

PROCEEDINGS OF THE 2017 THE 5TH INTERNATIONAL CONFERENCE ON CONTROL, MECHATRONICS AND AUTOMATION (ICCMA 2017), 2017, :67-72

[45] Development of the cumene oxidation process: Rigorous design, optimization, and control [J].

Shen, Shiau-Jeng ;

Tseng, An-Hung ;

Shi, Chtwan-Chin ;

Yu, Bor-Yih .

CHEMICAL ENGINEERING RESEARCH & DESIGN, 2023, 200 :602-614

[46] A New Approach to Batch Process Optimization Using Experimental Design [J].

Wissmann, Paul J. ;

Grover, Martha A. .

AICHE JOURNAL, 2009, 55 (02) :342-353

[47] Recent developments in deterministic global optimization and their relevance to process design [J].

Floudas, CA ;

Pardalos, PM .

FIFTH INTERNATIONAL CONFERENCE ON FOUNDATIONS OF COMPUTER-AIDED PROCESS DESIGN, 2000, 96 (323) :84-98

[48] Technology analysis of integrated biorefineries through process simulation and hybrid optimization [J].

Geraili, A. ;

Sharma, P. ;

Romagnoli, J. A. .

ENERGY, 2014, 73 :145-159

[49] Simulation and optimization of a methanol synthesis process from different biogas sources [J].

dos Santos, Rafael Oliveira ;

Santos, Lizandro de Sousa ;

Prata, Diego Martinez .

JOURNAL OF CLEANER PRODUCTION, 2018, 186 :821-830

[50] Simulation, case studies and optimization of a biodiesel process with a solid acid catalyst [J].

West, Alex H. ;

Posarac, Dusko ;

Ellis, Naoko .

INTERNATIONAL JOURNAL OF CHEMICAL REACTOR ENGINEERING, 2007, 5

← 1 2 3 4 5 →