Structural and mechanical properties of nano-crystal TiN coatings

被引：0
作者：
Chenhui Zhang
Guoshun Pan
Jianbin Luo
Wenzhi Li
Darong Chen
机构：
[1] Tsinghua University,State Key Laboratory of Tribology
来源：
Science in China Series G: Physics, Mechanics and Astronomy | 2004年 / 47卷 / Suppl 1期
关键词：
TiN; nano-crystal; microstructure; hardness; grain-boundary triple junctions;
D O I：
10.1007/BF02690234
中图分类号：
学科分类号：
摘要：
The structural and mechanical properties of TiN coatings prepared by ion beam assisted deposition (IBAD) were studied. The coatings have a polycrystal structure with grain size of ≈10nm or less. The hardness of the coatings increases with increasing grain size of TiN crystallites. The coating with grain size of 10.3 nm even has a superhardness of 44.7 GPa. The relationship between the hardness and the grain size in the nano-crystalline coatings was discussed on the basis of grain-boundary triple junctions.
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页码：1 / 7
页数：6
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