Self-assembled metal/molecule/semiconductor nanostructures for electronic device and contact applications

被引:0
作者
D. B. Janes
Takhee Lee
Jia Liu
M. Batistuta
Nien-Po Chen
B. L. Walsh
R. P. Andres
E. -H. Chen
M. R. Melloch
J. M. Woodall
R. Reifenberger
机构
[1] Purdue University,School of Electrical and Computer Engineering
[2] Purdue University,Department of Physics
[3] Purdue University,School of Chemical Engineering
[4] Purdue University,NSF MRSEC for Technology Enabling Heterostructure Materials
[5] Yale University,Department of Electrical Engineering
来源
Journal of Electronic Materials | 2000年 / 29卷
关键词
Self-assembly; nanocluster; ohmic contact; GaAs; STM;
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摘要
We report a fabrication approach in which we combine self-assembled metal/molecule nanostructures with chemically stable semiconductor surface layers. The resulting structures have well controlled dimensions and geometries (∼4 nm Au nanoclusters) provided by the chemical self-assembly and have stable, low-resistance interfaces realized by the chemically stable semiconductor cap layer (low-temperature grown GaAs passivated by the organic tether molecules). Scanning tunneling microscope imaging and current-voltage spectroscopy of nanocontacts ton-GaAs fabricated using this approach indicate high quality, ohmic nanocontacts having a specific contact resistance of ∼1 × 10−7Ω·cm2 and a maximum current density of ∼1×107 A/cm2, both comparable to those observed in large area contacts. Uniform 2-D arrays of these nanocontact structures have been fabricated and characterized as potential cells for nanoelectronic device applications.
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