Effect of self-conjugate perforation in amorphous silicon carbide layers

被引：0

作者：

V. A. Karachinov

S. B. Toritsyn

D. V. Karachinov

机构：

[1] Novgorod State University,

来源：

Technical Physics | 2004年 / 49卷

关键词：

Silicon; Carbide; Perforation; Spectral Range; Mechanical Strength;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

SiC films on glass substrates are found to have an amorphous structure, high insulating properties, and good mechanical strength. The integrated transmission coefficient of the SiC films in the spectral range λ=0.4–0.7 µm depends on their thickness. The SiC films subjected to etching in hydrofluoric acid exhibit self-conjugate perforation.

引用

页码：1633 / 1634

页数：1

共 16 条

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