Frequency–amplitude double closed-loop control of weakly coupled resonators based on energy conservation

被引:0
作者
Bo Yang
Zhuoyue Liang
Xin Guo
机构
[1] Southeast University,School of Instrument Science and Engineering
[2] Nanjing University of Information Science and Technology,School of Automation
来源
Microsystem Technologies | 2023年 / 29卷
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摘要
The mode localization phenomenon of the weakly coupled resonators (WCRs), which is revealed as a small asymmetric perturbation introduced in the symmetric weakly coupled resonant system will lead to a drastic variation in the system energy distribution and amplitude ratios of the resonators, has been widely used in the topology design of micro-electro-mechanical system (MEMS) sensors. In order to improve the noise characteristics of mode-localized sensors, this paper presents an optimized measurement and control system, including the frequency closed-loop system based on phase-locked loop (PLL) and the amplitude closed-loop system based on energy conservation. The vibration energy of a weakly coupled resonant system can be represented by the sum of the squares of the amplitude of each resonant unit, and the total energy of resonant units is stabilized at a constant value by the amplitude closed-loop system based on energy conservation. The proposed measurement and control system is optimized by Simulink simulation software and finally verified with the fabricated prototype of a mode-localized airflow sensor. Experiment results demonstrate that compared with the amplitude open-loop detection method, the closed-loop control scheme based on energy conservation has better bias stability, which indicates that our proposal can improve the long-term stability of output signals of the weakly coupled resonant system.
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页码:1659 / 1669
页数:10
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