High B value Mn-Co-Ni spinel films on alumina substrate by RF sputtering

被引：0
作者：
Qin Shi
Wei Ren
Wenwen Kong
Bo Gao
Lei Wang
Chao Ma
Aimin Chang
Liang Bian
机构：
[1] Xinjiang Technical Institute of Physics & Chemistry,Key Laboratory of Functional Materials and Devices for Special Environments of CAS, Xinjiang Key Laboratory of Electronic Information Materials and Devices
[2] CAS,Department of Physics
[3] Shihezi University,College of Electronic Engineering
[4] Chendu Technological University,undefined
[5] University of Chinese Academy of Sciences,undefined
来源：
Journal of Materials Science: Materials in Electronics | 2017年 / 28卷
关键词：
Negative Temperature Coefficient; Thermal Conductivity Coefficient; Spinel Oxide; Chemical Solution Deposition; Chemical Solution Deposition Method;
D O I：
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中图分类号：
学科分类号：
摘要：
A series of Mn–Co–Ni–O spinel oxide films showing negative temperature coefficient were successfully deposited on alumina ceramic substrates by RF sputtering procedure. All films showed a poly-crystalline spinel structure. For an Ar:O2 ratio of 10:0, the deposited film showed the highest grow rate and a two-layer-structured Mn–Co–Ni–O spinel film was formed. The high performance of the MCN thin film is testified by a room temperature resistance of 4.16 MΩ, a B value of 5999 K and activation energy of 0.52 eV. These improvements are meaningful, especially concerning industrial applications.
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页码：9876 / 9881
页数：5
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