Performance evaluation of junctionless double surrounding gate In0.53Ga0.47As nanotube MOSFET using dual material gate engineering

被引:0
作者
B. Sanjay
Anil Prasad
机构
[1] Kurukshetra University,Electronic Science Department
来源
Journal of Materials Science: Materials in Electronics | 2021年 / 32卷
关键词
D O I
暂无
中图分类号
学科分类号
摘要
In this paper, the authors present the studies made on drain current (ID) for 5 nm gate length Dual Material (DM) Double Surrounding Gate (DSG) inversion mode (IM) and junctionless (JL) In0.53Ga0.47As nanotube (NT) MOSFET and Silvaco ATLAS 3D TCAD based simulation results are reported. In these studies, the authors have made use of the Non-Equilibrium Green’s Function (NEGF) approach and the self-consistent solution of Poisson’s equation with Schrodinger’s equation. In the case of inversion mode nanotube MOSFET, the channel region is lightly doped. The effect of Dual Material Gate Engineering for In0.53Ga0.47As Nano Tube channel radius 1.5 nm with gate oxide (Al2O3) thickness (0.8 nm) on ID, has also been studied. Further, a comparison of results has been done between IM DM DSG and JL DM DSG NT MOSFET. In the case of JL MOSFET, doping concentrations are optimized for two approaches (i) to get the same ION current as IM device and (ii) to get the same threshold voltage (VTH) as IM device. This results in 10 and 102 times smaller IOFF in matching ION and VTH optimized devices respectively as compared to IM device. It was found that DM Gate Engineering reduces drain induced barrier lowering (DIBL) in IM and JL devices. JL device is found to have much smaller DIBL ~ 21.10 mV/V, almost an ideal SS ~ 60 mV/dec, and a higher ION/IOFF ratio ~ 2.85 × 108 as compared to the results available for CGAA devices in the literature.
引用
收藏
页码:9171 / 9182
页数:11
相关论文
共 206 条
[1]  
Das UK(2018)Consideration of UFET architecture for the 5 nm node and beyond logic transistor J. Electron Devices Soc. 6 1129-1135
[2]  
Eneman G(2017)Impact of thin high-k dielectrics and gate metals on RF characteristics of 3D double gate junctionless transistor Mater. Sci. Semicond. Process. 71 413-420
[3]  
Velampati RSR(2012)Study of InGaAs-channel MOSFETs for analog/mixed-signal system-on-chip applications IEEE Electron Device Lett. 33 372-374
[4]  
Chauhan YS(2015)Tunneling and short channel effects in ultrascaled InGaAs double-gate MOSFETs IEEE Trans. Electron Devices 62 525-531
[5]  
Jinesh KB(2019)Highly-stable self-aligned Ni-InGaAs and non-self-aligned Mo contact for Monolithic 3D Integration of InGaAs MOSFETs IEEE J. Electron Devices Soc. 7 869-877
[6]  
Bhattacharyya TK(2014)Performance and variability of doped multithreshold FinFETs for 10-nm CMOS IEEE Trans. Electron Devices 61 3372-3378
[7]  
Baidya A(2017)Limitations on lateral nanowire scaling beyond 7nm node IEEE Electron Device Lett. 38 9-11
[8]  
Baishya S(2014)A Compact explicit model for long-channel gate-all-around junctionless MOSFETs. Part I: DC characteristics IEEE Trans. Electron Devices 61 3036-3041
[9]  
Lenka TR(2011)Gate-all-around junctionless transistors with heavily doped polysilicon nanowire channels IEEE Electron Device Lett. 32 521-523
[10]  
Tewari S(2016)Controlling L-BTBT and volume depletion in nanowire JLFETs using core-shell architecture IEEE Trans. Electron Device 63 3790-3794