Analysis and modeling of hysteresis of piezoelectric micro-actuator used in high precision dual-stage servo system

A dual-stage servo system consists of a primary coarse actuator for facilitating large motion and a secondary micro-actuator for small but precise motion to improve tracking performance. Piezoelectric micro-actuator made from lead zirconate titanate (PZT) has been a popular choice for the secondary stage. However, the advantage gained by the resolution of the secondary PZT actuator is reduced by its inherent hysteresis nonlinearity. Model based hysteresis compensation techniques are preferred due to their simplicity and fast response. Identification and modeling are two substantial parts in such model-based techniques. This paper presents a rigorous analysis and modeling of the hysteresis of PZT micro-actuator. Modified Generalized Prandtl-Ishlinskii and Coleman-Hodgdon models are studied. Identification of the model through nonlinear least square and particle swarm optimization are examined and compared. Several analyses are done through tuning of the model parameters and identification techniques. Experimental analysis and simulation results underscore the effectiveness of this modeling approach. Finally as a design example, a dual-stage simulation analysis is done to show the effectiveness of systematic modeling on hysteresis compensation. © 2015, South China University of Technology, Academy of Mathematics and Systems Science, Chinese Academy of Sciences and Springer-Verlag Berlin Heidelberg.