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Józef K(2018)Calibration of acoustic vector sensor based on MEMS microphones for DOA estimation Appl. Acoustics 141 307-321
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Grzegorz S(2017)Module packaging effects on MEMS airbag sensor performance for automobiles Microelectronics Reliability 79 328-335
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Park DH(2019)Design and feedforward control of large-rotation two-axis scan mirror assembly with MEMS sensor integration Chinese J. Aeronaut. 32 1912-1922
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Shin S(2018)Design, simulation and analysis of MEMS based Piezoresistive Cantilever sensor Mater. Today 5 10697-10703
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Kim YK(2017)Passive MEMS DC electric current sensor: part i—theoretical considerations IEEE Sensors J. 17 1230-1237
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Huang H(2017)Identification and elimination of hygro-thermo-mechanical stress-effects in a high-precision MEMS pressure sensor J. Microelectromech. Syst. 26 415-423
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Zheng X(2017)Modelling of resonant MEMS magnetic field sensor with electromagnetic induction sensing Solid-State Electron. 132 91-98
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Weipeng LI(2017)Wireless MEMS-based accelerometer sensor system for structure vibration and post defamation monitoring Adv. comput. Sci. Technol. 10 3197-3204
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Veena N(2019)A CMOS-MEMS thermoresistive micro calorimetric flow sensor with temperature compensation J. Microelectromech. Syst. 28 841-849
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Balachandra TC(2018)Attitude theory and experimental research of micro-aircraft based on MEMS sensor Yadian Yu Shengguang/Piezoelectrics and Acoustooptics 40 516-520