Comparative analysis of methods for measurement of the surface potential of dielectrics charging under electron-beam irradiation in a scanning electron microscope

被引：1
|
作者：
Rau E.I. [1 ]
Tatarintsev A.A. [1 ]
Kupreenko S.Y. [1 ]
Zaitsev S.V. [1 ]
Podbutsky N.G. [1 ]
机构：
[1] Moscow State University, Moscow
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2017年 / 11卷 / 5期
基金：
俄罗斯基础研究基金会;
关键词：
dielectric charging; electron-beam irradiation; scanning electron microscopy;
D O I：
10.1134/S1027451017050354
中图分类号：
学科分类号：
摘要：
A concise critical analysis of possible methods for measuring the suface potentials of dielectric targets under medium-energy electron-beam irradiation in a scanning electron microscope is carried out. The advantages of studying charging kinetics by recording a shift in the entire energy spectrum of emitted electrons are shown. Two new methods of surface-potential estimation are proposed: using the cathodoluminescence signal and the signal of backscattered electrons. It is found that the total energy of electrons reflected from charged dielectric targets is several times greater than the energy of electrons reflected from an uncharged dielectric. © 2017, Pleiades Publishing, Ltd.
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页码：1062 / 1068
页数：6
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