Characterization of an atmospheric pressure plasma jet for surface modification and thin film deposition

被引：1
|
作者：
S. Bornholdt
M. Wolter
H. Kersten
机构：
[1] Institute of Experimental and Applied Physics,
[2] Christian-Albrechts-Universität zu Kiel,undefined
来源：
The European Physical Journal D | 2010年 / 60卷
关键词：
Video Imaging; Optical Emission Spectroscopy; HMDSO; Plasma Beam; Calorimetric Probe;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
In this paper, an experimental study is presented to characterize a commercially available atmospheric pressure plasma jet (APPJ) kINPen which can be used for local surface modification, e.g. changing the wettability as well as for thin film deposition with silicon-organic and metal-organic precursors to enhance scratch resistance or to lower the gas permeability. Characterization of the jet discharge has been carried out by three methods: (i) measurement of the energy influx from the jet plasma to a substrate by a calorimetric probe, (ii) spatial resolved investigation of the plasma beam by optical emission spectroscopy (OES) and (iii) observation of the plasma jet by video imaging. The deposited SiOx and AlOx films were analyzed by XPS measurements.
引用
收藏
页码：653 / 660
页数：7
相关论文
共 50 条
  • [31] Atmospheric pressure plasma jet: A complete tool for surface enhanced Raman spectroscopy substrates preparation
    Bajpai, Abhilash
    Sharma, Rishi
    VACUUM, 2020, 172
  • [32] Ultra-hydrophobic biomimetic transparent bilayer thin film deposited by atmospheric pressure plasma
    Saget, Manon
    Nuns, Nicolas
    Supiot, Philippe
    Foissac, Corinne
    Bellayer, Severine
    Dourgaparsad, Kevin
    Royoux, Pierre-Alexandre
    Delaplace, Guillaume
    Thomy, Vincent
    Coffinier, Yannick
    Jimenez, Maude
    SURFACES AND INTERFACES, 2023, 42
  • [33] The Organosilicon thin Film Deposited Using an Atmospheric Pressure Dual-Frequency 50 kHz/33 MHz Frequency Micro-Plasma Jet
    Yuan, Q. H.
    Wang, X. M.
    Yin, G. Q.
    Li, J.
    Dong, C. Z.
    CONTRIBUTIONS TO PLASMA PHYSICS, 2016, 56 (09) : 870 - 877
  • [34] Deposition of silicon dioxide films using an atmospheric pressure microplasma jet
    Raballand, V.
    Benedikt, J.
    Hoffmann, S.
    Zimmermann, M.
    von Keudell, A.
    JOURNAL OF APPLIED PHYSICS, 2009, 105 (08)
  • [35] SUB-ATMOSPHERIC PRESSURE BARRIER DISCHARGE FOR SIOX DEPOSITION: PLASMA DIAGNOSTICS AND COATING CHARACTERIZATION
    Sublet, A.
    Dorier, J. L.
    Hollenstein, C.
    CAPPSA 2005, PROCEEDINGS, 2005, : 156 - 159
  • [36] Plasma Co-Polymerization of HMDSO and Limonene with an Atmospheric Pressure Plasma Jet
    Wulf, Gerrit
    Mayer, Bernd
    Lommatzsch, Uwe
    PLASMA, 2022, 5 (01) : 44 - 59
  • [37] Investigations of an atmospheric pressure plasma jet by optical emission spectroscopy
    Förster, S
    Mohr, C
    Viöl, W
    SURFACE & COATINGS TECHNOLOGY, 2005, 200 (1-4) : 827 - 830
  • [38] The Increase of the Jet Size of an Atmospheric-Pressure Plasma Jet by Ambient Air Control
    Hsu, Cheng-Che
    Yang, Yao-Jhen
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2010, 38 (03) : 496 - 499
  • [39] SiO2-like film deposition on cu surface assisted by atmospheric pressure diffuse discharge
    Li W.
    Wang R.
    Zhang C.
    Ren C.
    Li J.
    Shao T.
    Shao, Tao (st@mail.iee.ac.cn), 1600, Chinese Society for Electrical Engineering (36): : 6736 - 6742
  • [40] Electrical and Optical Characterization of Cold Atmospheric Pressure Plasma Jet and the Effects of N2 Gas on Argon Plasma Discharge
    Sharma, Vinita
    Hosoi, Katsuhiko
    Mori, Tamio
    Kuroda, Shin-ichi
    MATERIALS, MECHANICAL ENGINEERING AND MANUFACTURE, PTS 1-3, 2013, 268-270 : 522 - +
12345