Characterization of an atmospheric pressure plasma jet for surface modification and thin film deposition

被引：1
|
作者：
S. Bornholdt
M. Wolter
H. Kersten
机构：
[1] Institute of Experimental and Applied Physics,
[2] Christian-Albrechts-Universität zu Kiel,undefined
来源：
The European Physical Journal D | 2010年 / 60卷
关键词：
Video Imaging; Optical Emission Spectroscopy; HMDSO; Plasma Beam; Calorimetric Probe;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
In this paper, an experimental study is presented to characterize a commercially available atmospheric pressure plasma jet (APPJ) kINPen which can be used for local surface modification, e.g. changing the wettability as well as for thin film deposition with silicon-organic and metal-organic precursors to enhance scratch resistance or to lower the gas permeability. Characterization of the jet discharge has been carried out by three methods: (i) measurement of the energy influx from the jet plasma to a substrate by a calorimetric probe, (ii) spatial resolved investigation of the plasma beam by optical emission spectroscopy (OES) and (iii) observation of the plasma jet by video imaging. The deposited SiOx and AlOx films were analyzed by XPS measurements.
引用
收藏
页码：653 / 660
页数：7
相关论文
共 50 条
  • [1] Characterization of an atmospheric pressure plasma jet for surface modification and thin film deposition
    Bornholdt, S.
    Wolter, M.
    Kersten, H.
    EUROPEAN PHYSICAL JOURNAL D, 2010, 60 (03): : 653 - 660
  • [2] Atmospheric Pressure Microwave Plasma Jet for Organic Thin Film Deposition
    Narimisa, Mehrnoush
    Krcma, Frantisek
    Onyshchenko, Yuliia
    Kozakova, Zdenka
    Morent, Rino
    De Geyter, Nathalie
    POLYMERS, 2020, 12 (02)
  • [3] Deposition of Fluorine-Containing Thin Film by Atmospheric Pressure Plasma Jet and Film Surface Structural Transition
    Ma, Wei-Chun
    Lin, Chin-Ho
    Huang, Chun
    PLASMA PROCESSES AND POLYMERS, 2015, 12 (04) : 362 - 371
  • [4] Glow plasma treatment at atmospheric pressure for surface modification and film deposition
    Kanazawa, S., 1600, (B37-38): : 1 - 2
  • [5] Thin film deposition and surface modification with atmospheric pressure dielectric barrier discharges
    Fanelli, Fiorenza
    SURFACE & COATINGS TECHNOLOGY, 2010, 205 (05): : 1536 - 1543
  • [6] GLOW PLASMA TREATMENT AT ATMOSPHERIC-PRESSURE FOR SURFACE MODIFICATION AND FILM DEPOSITION
    KANAZAWA, S
    KOGOMA, M
    OKAZAKI, S
    MORIWAKI, T
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 : 842 - 845
  • [7] Thin film deposition by means of atmospheric pressure microplasma jet
    Benedikt, J.
    Raballand, V.
    Yanguas-Gil, A.
    Focke, K.
    von Keudell, A.
    PLASMA PHYSICS AND CONTROLLED FUSION, 2007, 49 (12B) : B419 - B427
  • [8] Modelling of plasma generation and thin film deposition by a non-thermal plasma jet at atmospheric pressure
    Sigeneger, F.
    Becker, M. M.
    Foest, R.
    Loffhagen, D.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2016, 49 (34)
  • [9] Superhydrophilization of Surface of Aluminum Thin Film by Atmospheric-Pressure Plasma Jet Irradiation
    Kuwahata, Hiroshi
    Murata, Yuki
    Hashimoto, Naoki
    Segawa, Riyuya
    E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY, 2018, 16 : 27 - 35
  • [10] Low-Temperature Atmospheric-Pressure-Plasma Jet for Thin-Film Deposition
    Huang, Chun
    Hsu, Wen-Tung
    Liu, Chi-Hung
    Wu, Shin-Yi
    Yang, Shih-Hsien
    Chen, Tai-Hung
    Wei, Ta-Chin
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2009, 37 (07) : 1127 - 1128
12345