Low-Temperature Growth of ZnMgO Thin Films by Atmospheric Spin-Coating Using Diethylzinc Solution

被引：0
作者：
Kenji Yoshino
Himeka Tominaga
Yuta Komaki
Masato Imai
Tomohiro Higashi
Takashi Minemoto
Qing Shen
Shuzi Hayase
机构：
[1] University of Miyazaki,Department of Electrical and Electronic Engineering
[2] University of Miyazaki,Institute for Tenure Track Promotion
[3] Ritsumeikan University,Department of Electrical and Electronic Engineering
[4] The University of Electro-Communications,Department of Engineering Science
[5] The University of Electro-Communications,i
来源：
Journal of Electronic Materials | 2023年 / 52卷
关键词：
ZnMgO; spin coating; diethylzinc; XRD; SEM; AFM;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：5134 / 5139
页数：5
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