Self-Healing of Defect-Mediated Disorder in ZnO Thin Films Grown by Atomic Layer Deposition

被引：0
作者：
Don P. Benny
Vikas Munya
Arpan Ghosh
Ravinder Kumar
Dipayan Pal
Herbert Pfnür
Sudeshna Chattopadhyay
机构：
[1] Indian Institute of Technology Indore,Department of Physics
[2] Leibniz Universität Hannover,Department ATMOS, Institute for Solid State Physics
来源：
Journal of Electronic Materials | 2023年 / 52卷
关键词：
Atomic layer deposition; ZnO thin-film; defect-induced disorder; Urbach energy; morphology; photoluminescence; thickness-dependent optical properties;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：8293 / 8302
页数：9
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