Angle Sensor for a High-Speed Galvo Scanner

被引：0

作者：

Gilyazov M.R. ^{[1
]}

Nagulin K.Y. ^{[1
]}

Gil’mutdinov A.K. ^{[1
]}

机构：

[1] Tupolev Kazan National Research Technical University, ul. Karla Marksa 10, Kazan

来源：

Russian Aeronautics | 2018年 / 61卷 / 3期

关键词：

angle sensor; galvo scanner;

D O I：

10.3103/S1068799818030261

中图分类号：

学科分类号：

摘要：

The capacitive angle sensor of the galvanometer scanner is designed. The task of developing a rotation angle sensor in the range of ±20 deg for scanning speeds of up to 20 kHz is being solved. The linear dependence of the change in capacitance on the angle in the considered range is achieved. © 2018, Allerton Press, Inc.

引用

页码：495 / 498

页数：3

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