Decreasing Density of Grown-in Dislocations in AlN/c-Sapphire Templates Grown by Plasma-Activated Molecular Beam Epitaxy

被引:0
|
作者
V. V. Ratnikov
D. V. Nechaev
A. V. Myasoedov
O. A. Koshelev
V. N. Zhmerik
机构
[1] Ioffe Physical Technical Institute,
[2] Russian Academy of Sciences,undefined
来源
Technical Physics Letters | 2020年 / 46卷
关键词
molecular beam epitaxy; AlN/c-sapphire templates; grown-in dislocations; X-ray diffractometry.;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:389 / 392
页数:3
相关论文
共 50 条
  • [1] Decreasing Density of Grown-in Dislocations in AlN/c-Sapphire Templates Grown by Plasma-Activated Molecular Beam Epitaxy
    Ratnikov, V. V.
    Nechaev, D. V.
    Myasoedov, A. V.
    Koshelev, O. A.
    Zhmerik, V. N.
    TECHNICAL PHYSICS LETTERS, 2020, 46 (04) : 389 - 392
  • [2] Surface reconstruction patterns of AlN grown by molecular beam epitaxy on sapphire
    Davis, CS
    Novikov, SV
    Cheng, TS
    Campion, RP
    Foxon, CT
    JOURNAL OF CRYSTAL GROWTH, 2001, 226 (2-3) : 203 - 208
  • [3] Epitaxial single-crystal of GaSe epilayers grown on a c-sapphire substrate by molecular beam epitaxy
    Wu, Chia-Hsin
    Yang, Chu-Shou
    Wang, Yen-Chi
    Huang, Hsi-Jung
    Ho, Yen-Teng
    Wei, Lin-Lung
    Chang, Edward Yi
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2015, 212 (10): : 2201 - 2204
  • [4] Residual stress in AlN films grown on sapphire substrates by molecular beam epitaxy
    Rong, Xin
    Wang, Xinqiang
    Chen, Guang
    Pan, Jianhai
    Wang, Ping
    Liu, Huapeng
    Xu, Fujun
    Tan, Pingheng
    Shen, Bo
    SUPERLATTICES AND MICROSTRUCTURES, 2016, 93 : 27 - 31
  • [5] Studies of N-Doped p-ZnO Layers Grown on c-Sapphire by Radical Source Molecular Beam Epitaxy
    Ivanov, S. V.
    El-Shafr, A.
    Al-Suleiman, M.
    Bakin, A.
    Waag, A.
    Lyublinskaya, O. G.
    Shmidt, N. M.
    Listoshin, S. B.
    Kyutt, R. N.
    Ratnikov, V. V.
    Terentyev, A. Ya.
    Ber, B. Ya.
    Komissarova, T. A.
    Ryabova, L. I.
    Khokhlov, D. R.
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2008, 53 (05) : 3016 - 3020
  • [6] Properties of AlN layers grown on c-sapphire substrate using ammonia assisted MBE
    Matta, Samuel
    Brault, Julien
    Korytov, Maxim
    Thi Quynh Phuong Vuong
    Chaix, Catherine
    Al Khalfioui, Mohamed
    Vennegues, Philippe
    Massies, Jean
    Gil, Bernard
    JOURNAL OF CRYSTAL GROWTH, 2018, 499 : 40 - 46
  • [7] The effect of AlN buffer growth parameters on the defect structure of GaN grown on sapphire by plasma-assisted molecular beam epitaxy
    Wong, Yuen-Yee
    Chang, Edward Yi
    Yang, Tsung-Hsi
    Chang, Jet-Rung
    Chen, Yi-Cheng
    Ku, Jui-Tai
    Lee, Ching-Ting
    Chang, Chun-Wei
    JOURNAL OF CRYSTAL GROWTH, 2009, 311 (06) : 1487 - 1492
  • [8] Investigation of platinum films grown on sapphire (0001) by molecular beam epitaxy
    Zhou, H
    Wochner, P
    Schöps, A
    Wagner, T
    JOURNAL OF CRYSTAL GROWTH, 2002, 234 (2-3) : 561 - 568
  • [9] The structure of GaN layers grown on SiC and sapphire by molecular beam epitaxy
    Ruterana, P
    Vermaut, P
    Potin, V
    Nouet, G
    Botchkarev, A
    Salvador, A
    Morkoc, H
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 50 (1-3): : 72 - 75
  • [10] Radio frequency plasma nitridation of c-plane sapphire;: influence on properties of GaN grown by molecular beam epitaxy
    Heinlein, C
    Grepstad, JK
    Riechert, H
    Averbeck, R
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1999, 58 (03): : 270 - 273