Spectroscopic analysis and thermoelectric properties of ITO/Cu/Ni/ITO multilayer by RF sputtering

被引:1
作者
Tchenka, Abdelaziz [1 ]
Agdad, Abdelali [1 ]
Amiri, Lahoucine [1 ]
Bousseta, Mohammed [1 ]
El Mouncharih, Abdelkarim [1 ]
Elmassi, Said [1 ]
Nkhaili, Lahcen [1 ]
Ech-Chamikh, Elmaati [1 ]
机构
[1] Cadi Ayyad Univ, Fac Sci Semlalia, Phys Dept, Lab Mat Energy & Environm LaMEE, POB 2390, Marrakech 40000, Morocco
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2024年 / 130卷 / 05期
关键词
ITO/Cu/Ni/ITO; Multilayer; Optical properties; Electrical properties; Thermoelectric properties; TRANSPARENT CONDUCTIVE ITO; THIN-FILMS; ELECTRICAL-PROPERTIES; SUBSTRATE; THICKNESS; POWER; TEMPERATURE; PRESSURE;
D O I
10.1007/s00339-024-07457-z
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper, we present the effects of annealing in a vacuum on the structural, electrical, thermoelectric, optical and properties of a glass/ITO (40 nm)/Cu (5 nm)/Ni (10 nm)/ITO (40 nm) multilayer prepared on glass substrates at room temperature using the Radio Frequency (RF) sputtering technique. The effect of annealing in a vacuum is investigated. The structures of the ICNI were analyzed using X-Ray Reflectivity (XRR) and X-Ray Diffraction (XRD). Furthermore, the electrical and optical properties were characterized using the four-point probe measurement method and a UV-Vis-NIR spectrometer, respectively. The influence of the annealing temperature in a vacuum on transmittance, structural integrity, electrical behavior, energy band gap, resistivity, Seebeck coefficient, and figure of merit were investigated.
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页数:8
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共 62 条
  • [1] Spectroscopic study of the effect of annealing temperature and atmosphere on the opto-electrical properties of sputtered ITO thin films
    Agdad, Abdelali
    Tchenka, Abdelaziz
    Chaik, Mounir
    Hnawi, Salma Kaotar
    Samba Vall, Cheikh Mohamed
    Nkhaili, Lahcen
    Azizan, Mustapha
    Ech-chamikh, Elmaati
    Ijdiyaou, Youssef
    [J]. BULLETIN OF MATERIALS SCIENCE, 2023, 46 (02)
  • [2] Effect of annealing temperature in nitrogen atmosphere and under vacuum on structural, optical and electrical properties of sputtered ITO/Ni/ITO multilayer
    Agdad, Abdelali
    Tchenka, Abdelaziz
    Chaik, Mounir
    Hnawi, Salma Kaotar
    Azizan, Mustapha
    Ech-chamikh, Elmaati
    Ijdiyaou, Youssef
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2022, 128 (04):
  • [3] Effects of deposition time on properties of CaCu3Ti4O12 thin film deposited on ITO substrate by RF magnetron sputtering at ambient temperature
    Ahmadipour, Mohsen
    Ain, Mohd Fadzil
    Goutham, Solleti
    Ahmad, Zainal Arifin
    [J]. CERAMICS INTERNATIONAL, 2018, 44 (15) : 18817 - 18820
  • [4] Optical and electrical properties of transparent conductive ITO thin films deposited by sol-gel process
    Alam, MJ
    Cameron, DC
    [J]. THIN SOLID FILMS, 2000, 377 : 455 - 459
  • [5] Structural, optical and electrical characterization of ITO, ITO/Ag and ITO/Ni transparent conductive electrodes
    Ali, Ahmad Hadi
    Shuhaimi, Ahmad
    Hassan, Zainuriah
    [J]. APPLIED SURFACE SCIENCE, 2014, 288 : 599 - 603
  • [6] Effects of film thickness and sputtering power on properties of ITO thin films deposited by RF magnetron sputtering without oxygen
    Amalathas, Amalraj Peter
    Alkaisi, Maan M.
    [J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2016, 27 (10) : 11064 - 11071
  • [7] Babu B. J., 2011, C RECORD IEEE PHOTOV
  • [8] Double layer structure of ZnO thin films deposited by RF-magnetron sputtering on glass substrate
    Besleaga, C.
    Stan, G. E.
    Galca, A. C.
    Ion, L.
    Antohe, S.
    [J]. APPLIED SURFACE SCIENCE, 2012, 258 (22) : 8819 - 8824
  • [9] Effect of RF sputtering power and vacuum annealing on the properties of AZO thin films prepared from ceramic target in confocal configuration
    Challali, Fatiha
    Mendil, Djelloul
    Touam, Tahar
    Chauveau, Thierry
    Bockelee, Valerie
    Sanchez, Alexis Garcia
    Chelouche, Azeddine
    Besland, Marie-Paule
    [J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2020, 118
  • [10] Chen X., 2024, Opt. Mater. (Amst), V147, P114687, DOI [10.1016/j.optmat.2023.114687, DOI 10.1016/J.OPTMAT.2023.114687]