Two nanomechanical properties of the molecular deposition (MD) film deposited on the Au substrate were studied. The first is its nanotribological property investigated by an atomic force microscope, which indicates that the deposition of the MD film could reduce the frictional force. The second is its nano-indent property studied by a nano-indenter. The results show that, after the MD film is deposited on the Au substrate, the elastic modulus, hardness and load decreased all, moreover, the elastic deformation increased and the plastic deformation decreased, which indicates that the MD film can improve the nanomechanical properties of the Au substrate.
