A Michelson twin interferometer for phase-shifting measurement

被引：0
作者：
Tetsuo Harimoto
Kikyo Toshima
机构：
[1] University of Yamanashi,Department of Advanced Materials, Faculty of Engineering
来源：
Optical Review | 2023年 / 30卷
关键词：
Michelson twin interferometer; phase-shifting measurement; Four-step interferometric method;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Phase-shifting measurement with a Michelson twin interferometer, in which two interference signals concerning measurement and reference beams are generated from a common optical system simultaneously, is carried out with a conventional four-step interferometric method. Although the interference signal of each beam changes over time, they have a synchronous relationship and the error component can be effectively eliminated by extracting the phase difference between the measurement and reference beams.
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页码：350 / 354
页数：4
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