Parametrically excited microelectromechanical systems (MEMS) [Parametererregte mikroelektromechanische Systeme (MEMS)]

被引：3
|
作者：
Kniffka T.J. [1 ]
Ecker H. [1 ]
机构：
[1] Institut für Mechanik und Mechatronik, Technische Universität Wien, Getreidemarkt 9, Wien
来源：
e & i Elektrotechnik und Informationstechnik | 2015年 / 132卷 / 8期
关键词：
parametric anti-resonance; parametric excitation; parametric resonance;
D O I：
10.1007/s00502-015-0372-8
中图分类号：
学科分类号：
摘要：
Four examples of parametrically excited microelectromechanical systems from literature are presented and compared. The equations of motion of the studied examples are generalized. The solutions of this generalized non-linear equation of motion are presented and discussed. Principles of parametrically excited systems are examined. It is demonstrated how in the given examples different characteristics of parametrically excited systems are employed to outperform conventional systems. © 2015, Springer Verlag Wien.
引用
收藏
页码：456 / 461
页数：5
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