Uncertainty in measurement of semiconductor piezoresistive sensors

被引：0
|
作者：
P. L. P. Hoa
G. Gerlach
G. Suchaneck
机构：
[1] Institute for Solid-State Electronics,
[2] Dresden University of Technology,undefined
[3] D-01062 Dresden,undefined
[4] Germany,undefined
来源：
Microsystem Technologies | 2003年 / 9卷
关键词：
Measurement Uncertainty; Physical Relationship; Requirement Document; Respective Measurement;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
 The analysis of the measurement uncertainty of piezoresistive sensors should be performed according to the ISO “Guide to the Expression of Uncertainty in Measurement” (GUM) and the requirement document EAL-R2 of the `European co-operation for Accreditation of Laboratories'. In this work, the derivation of a model of the physical relationships between quantities in the respective measurement is demonstrated for the case of a piezoresistive sensor. The model is used to evaluate the uncertainty in measurement of semiconductor piezoresistive sensors.
引用
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页码：210 / 214
页数：4
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