The effect of thermal treatment on the structure of tantalum oxide films grown on titanium

被引：0
|
作者：
V. A. Zhabrev
Yu. A. Bystrov
L. P. Efimenko
A. E. Komlev
V. G. Baryshnikov
A. A. Kolomiitsev
V. I. Shapovalov
机构：
[1] Russian Academy of Sciences,Institute of Silicate Chemistry
[2] St. Petersburg State Electrotechnical University,undefined
来源：
Technical Physics Letters | 2004年 / 30卷
关键词：
Oxide; Titanium; Crystallization; Dioxide; Rutile;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We have studied amorphous films of tantalum oxide deposited onto titanium substrate by reactive magnetron sputtering. Subsequent annealing at temperatures above 600°C leads to crystallization with the formation of a β-Ta2O5 phase. Thermal treatment in air results in oxidation of the substrate with the formation of a rutile modification of titanium dioxide.
引用
收藏
页码：396 / 398
页数：2
相关论文
共 50 条
  • [41] Stoichiometry and structure driven optical properties of carbon incorporated titanium oxide thin films
    Lee, Chang Mook
    Choi, Jaewu
    OPTICAL MATERIALS EXPRESS, 2016, 6 (11): : 3594 - 3608
  • [42] Effect of heat treatment on cohesion of films on alkali-treated titanium
    Kobayashi, S
    Inoue, T
    Nakai, K
    MATERIALS TRANSACTIONS, 2005, 46 (02) : 207 - 210
  • [43] Regularities of Electrochemical Formation and Properties of Oxide Films on Titanium–Iron Alloys
    A. N. Kamkin
    N. G. Bukhan'ko
    L. M. Glukhov
    Russian Journal of Electrochemistry, 2002, 38 : 1104 - 1109
  • [44] Hot target magnetron sputtering process: Effect of infrared radiation on the deposition of titanium and titanium oxide thin films
    Graillot-Vuillecot, Robin
    Thomann, Anne-Lise
    Lecas, Thomas
    Cachoncinlle, Christophe
    Millon, Eric
    Caillard, Amael
    VACUUM, 2020, 181
  • [45] Features of diffusion dissolution of oxide films on titanium under conditions of thermocycling
    Luk'yanenko, OH
    Maksymovych, HH
    Pavlyna, VS
    Pichuhin, AT
    MATERIALS SCIENCE, 1998, 34 (01) : 84 - 89
  • [46] Growth of single phase tetragonal structure iron tantalum oxide thin films grown by sol-gel spin coating technique (vol 20, pg 969, 2001)
    Phani, A. R.
    Santucci, S.
    JOURNAL OF MATERIALS SCIENCE, 2007, 42 (14) : 5896 - 5896
  • [47] Effect of Heat Treatment on Phase Transition of Nanotubular Titanium Oxide Arrays
    Park, Sangwon
    Min, Dongryoul
    Lim, Hyunpil
    Yoon, DongJoo
    Lee, Kwangmin
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2011, 11 (02) : 1476 - 1479
  • [48] Effect of thermohydrogen treatment on the structure and properties of titanium alloy castings
    Il'in, AA
    Skvortsova, SV
    Mamonov, AM
    Permyakova, GV
    Kurnikov, DA
    METAL SCIENCE AND HEAT TREATMENT, 2002, 44 (5-6) : 185 - 189
  • [49] Synthesis of tantalum thin films on titanium by plasma immersion ion implantation and deposition
    Meng, Fanhao
    Li, Zihui
    Liu, Xuanyong
    SURFACE & COATINGS TECHNOLOGY, 2013, 229 : 205 - 209
  • [50] Effect of Thermohydrogen Treatment on the Structure and Properties of Titanium Alloy Castings
    A. A. Il'in
    S. V. Skvortsova
    A. M. Mamonov
    G. V. Permyakova
    D. A. Kurnikov
    Metal Science and Heat Treatment, 2002, 44 : 185 - 189
12345