Three-Probe Error Separation with Chromatic Confocal Sensors for Roundness Measurement

被引：2

作者：

Bai J. ^{[1
,2
]}

Wang Y. ^{[1
]}

Wang X. ^{[1
]}

Zhou Q. ^{[1
]}

Ni K. ^{[1
]}

Li X. ^{[1
]}

机构：

[1] Shenzhen International Graduate School, Tsinghua University, Shenzhen

[2] Institute of Materials, China Academy of Engineering Physics, Mianyang

来源：

Nanomanufacturing and Metrology | 2021年 / 4卷 / 4期

基金：

中国国家自然科学基金;

关键词：

Chromatic confocal sensor; Monte Carlo simulation; Roundness measurement; Three-probe error separation;

D O I：

10.1007/s41871-021-00120-8

中图分类号：

学科分类号：

摘要：

In this study, three-probe error separation was developed with three chromatic confocal displacement sensors for roundness measurement. Here, the harmonic suppression is discussed first to set suitable orientation angles among three sensors. Monte Carlo simulation is utilized to test the error separation and optimize the orientation angles and off-axial distance. The experimental setup is established using chromatic confocal sensors with a precise rotary platform. The experimental results show that the measured roundness with an orientation-angle combination of (0°, 90.1°, and 178.6°) is much better than that of another nonoptimal selection (0°, 90.4°, and 177.4°). The roundness error is only 0.7% between the proposed measurement system and an expensive ultraprecision roundness meter. Furthermore, it is proven that the eccentricity distance should be decreased as small as possible to improve the measurement accuracy. In sum, this paper proposes a feasible method for roundness measurement with reliable simulations, easily integrated sensors, and an ordinary precision rotary platform. © 2021, The Author(s).

引用

页码：247 / 255

页数：8

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