Automated Hybridization of X-ray Absorber Elements A Path to Large Format Microcalorimeter Arrays

被引：0

作者：

Samuel J. Moseley

Christine A. Allen

Nicholas Costin

Richard Kelley

Caroline Kilbourne

Timothy Miller

机构：

[1] NASA Goddard Space Flight Center Code 553,

[2] MEI Technologies,undefined

[3] Inc.,undefined

来源：

Journal of Low Temperature Physics | 2008年 / 151卷

关键词：

X-ray absorbers; Mercury telluride; SU-8; Automated tile application; Adhesive attachment; XeF2 etching; 07.85.Nc; 07.20.Fw; 95.55.Ka;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

We have developed an automated die-scale process for the attachment of X-ray absorbers onto microcalorimeters. Here, we describe the process for the production of absorber tiles on a handle wafer, their attachment to the microcalorimeter, and the removal of the supporting handle wafer. The process is shown to be a robust path to large format arrays of microcalorimeters.

引用

页码：418 / 423

页数：5

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