Analysis of the Chemical Composition and Structure of Micrometer-Thick Complex Oxide Films: A Case Study of a MgAl2O4 Film on SiO2 Using Electron Probe Microanalysis and Confocal Raman Spectroscopy

被引：0
作者：
V. A. Bulatov
Yu. V. Shchapova
D. A. Zamyatin
L. Ya. Sushanek
A. S. Kamenetskikh
S. L. Votyakov
机构：
[1] Zavaritsky Institute of Geology and Geochemistry,
[2] Ural Branch,undefined
[3] Russian Academy of Sciences,undefined
[4] Institute of Electrophysics,undefined
[5] Ural Branch,undefined
[6] Russian Academy of Sciences,undefined
来源：
Journal of Analytical Chemistry | 2023年 / 78卷
关键词：
electron probe microanalysis; Raman spectroscopy; thin films; MgAl; O;
D O I：
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学科分类号：
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页码：1630 / 1641
页数：11
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