Charged particle energy analyzer based on a modified cylindrical mirror in the ring-axis focusing mode

被引:0
|
作者
L. A. Baranova
机构
[1] Russian Academy of Sciences,Ioffe Physical Technical Institute
来源
Technical Physics | 2014年 / 59卷
关键词
Charged Particle; Outer Cylinder; Spherical Aberration; Trajec Tory; Cylindrical Mirror;
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学科分类号
摘要
The electron-optical properties of systems with a modified structure of the energy analyzer in the form of a cylindrical mirror proposed earlier are investigated. The analyzer operating mode in which the source of charged particles is in the inner cylinder and the detector is on the cylinder axis (ring-axis focusing) is considered. It is shown using numerical simulation that the modified structure ensures higher focusing quality as compared to the traditional cylindrical mirror. The optimal structure and voltage supply are determined for which spherical aberration is five times smaller than with a conventional cylindrical mirror.
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页码:463 / 465
页数:2
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