X-ray diffraction analyses of RF sputtered Ba0.6Sr0.4TiO3 thin films grown on Pt/Ti/LaAlO3 (100) substrates

Ba0.6Sr0.4TiO3 ferroelectric thin films were deposited on Pt/Ti/LaAlO3 (100) substrates by RF magnetron sputtering system. This paper focused on X-ray diffraction (XRD) analyses of Ba0.6Sr0.4TiO3 thin films on single-crystal LaAlO3 (LAO) substrates by three aspects research. Triple-axis XRD was utilized to investigate the mosaic defects of single-crystal LAO substrate. Both the out-of-plane grazing incidence mapping and ω-scan techniques were applied to research the crystallographic oriented growth of polycrystalline Ba0.6Sr0.4TiO3 thin films. X-ray Φ-scans and pole figures were used to assess the orientation relationship between the film and substrate.